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SEMI M47 : 2007

SEMI M47 : 2007

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

SPECIFICATION FOR SILICON-ON-INSULATOR (SOI) WAFERS FOR CMOS LSI APPLICATIONS

Withdrawn date

01-11-2010

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2001) Also available in CD-ROM. (06/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

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