SEMI M78 : 2010
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE FOR DETERMINING NANOTOPOGRAPHY OF UNPATTERNED SILICON WAFERS FOR THE 130 NM TO 22 NM GENERATIONS IN HIGH VOLUME MANUFACTURING
06-11-2018
12-01-2013
Specifies the determination and reporting of the Nanotopography of unpatterned silicon wafer surfaces for device generations from 130 nm to 22 nm.
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