SEMI M80 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS
Published date
12-01-2013
Defines the front-opening shipping box (FOSB) used to ship 450 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.
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