SEMI MF1048 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR MEASURING THE REFLECTIVE TOTAL INTEGRATED SCATTER
Published date
12-01-2013
Superseded date
03-11-2023
Superseded by
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Contains the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI PV15 : 2011(R2015) | GUIDE FOR DEFINING CONDITIONS FOR ANGLE RESOLVED LIGHT SCATTER MEASUREMENTS TO MONITOR THE SURFACE ROUGHNESS AND TEXTURE OF PV MATERIALS |
| SEMI ME1392 : 2016 | GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES |
| SEMI M1 : 2017 | SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS |
| SEMI PV31 : 2012(R2017) | TEST METHOD FOR SPECTRALLY RESOLVED REFLECTIVE AND TRANSMISSIVE HAZE OF TRANSPARENT CONDUCTING OXIDE (TCO) FILMS FOR PV APPLICATION |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
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