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SEMI MF1048 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR MEASURING THE REFLECTIVE TOTAL INTEGRATED SCATTER

Superseded date

03-11-2023

Superseded by

SEMI MF1048:2017(R2023)

Published date

12-01-2013

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Contains the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI PV15 : 2011(R2015) GUIDE FOR DEFINING CONDITIONS FOR ANGLE RESOLVED LIGHT SCATTER MEASUREMENTS TO MONITOR THE SURFACE ROUGHNESS AND TEXTURE OF PV MATERIALS
SEMI ME1392 : 2016 GUIDE FOR ANGLE RESOLVED OPTICAL SCATTER MEASUREMENTS ON SPECULAR OR DIFFUSE SURFACES
SEMI M1 : 2017 SPECIFICATION FOR POLISHED SINGLE CRYSTAL SILICON WAFERS
SEMI PV31 : 2012(R2017) TEST METHOD FOR SPECTRALLY RESOLVED REFLECTIVE AND TRANSMISSIVE HAZE OF TRANSPARENT CONDUCTING OXIDE (TCO) FILMS FOR PV APPLICATION

SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY

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