SEMI MF1391 : 2007(R2012)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR INTERSTITIAL OXYGEN CONTENT OF SILICON BY INFRARED ABSORPTION WITH SHORT BASELINE
Superseded date
16-11-2023
Published date
12-01-2013
Intended to be used as a method for determining the interstitial oxygen content of silicon slices.
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