SEMI MF1617 : 2004(R2016)
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The latest, up-to-date edition.
TEST METHOD FOR MEASURING SURFACE SODIUM, ALUMINUM, POTASSIUM, AND IRON ON SILICON AND EPI SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY
Published date
12-01-2013
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Describes the determination of total sodium, aluminum, potassium, and iron on the surface of mirror-polished single crystal silicon and silicon epi substrates using SIMS.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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