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SEMI E141 : 2005

SEMI E141 : 2005

Current

Current

The latest, up-to-date edition.

GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a guide for a unique specification of the most commonly applied ellipsometer equipment, the comprised modules and components, and their spatial arrangement. Also describes reflection ellipsometric measurements in integrated metrology and covers the typical applications of ellipsometry, which are the determination of layer thickness and optical properties.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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