SEMI MF657 : 2007E
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
TEST METHOD FOR MEASURING WARP AND TOTAL THICKNESS VARIATION ON SILICON WAFERS BY NONCONTRAST SCANNING
01-09-2014
12-01-2013
Covers a noncontacting, nondestructive procedure to determine the warp and total thickness variation (TTV) of clean, dry silicon wafers in a free (unclamped) condition.
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