SEMI PV49 : 2013(R2018)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR THE MEASUREMENT OF ELEMENTAL IMPURITY CONCENTRATIONS IN SILICON FEEDSTOCK FOR SILICON SOLAR CELLS BY BULK DIGESTION, INDUCTIVELY COUPLED-PLASMA MASS SPECTROMETRY
Published date
08-11-2018
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Contains the quantitative determination of bulk trace dopant and metal contamination of crystalline, and amorphous silicon chunks using an acid mixture to dissolve the silicon matrix and analytes.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI MF1724 : 2004 | TEST METHOD FOR MEASURING SURFACE METAL CONTAMINATION OF POLYCRYSTALLINE SILICON BY ACID EXTRACTION-ATOMIC ABSORPTION SPECTROSCOPY |
| SEMI MF43 : 2016 | TEST METHOD FOR RESISTIVITY OF SEMICONDUCTOR MATERIALS |
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