SEMI S23 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT
Superseded date
11-12-2021
Superseded by
Published date
12-01-2013
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Defines concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI S29 : 2012 | GUIDE FOR FLUORINATED GREENHOUSE GAS (F-GHG) EMISSION CHARACTERIZATION AND REDUCTION |
| SEMI E175 : 2016 | SPECIFICATION FOR SUBSYSTEM ENERGY SAVING MODE COMMUNICATION (SESMC) |
| SEMI E167 : 2013 | SPECIFICATION FOR EQUIPMENT ENERGY SAVING MODE COMMUNICATIONS (EESM) |
| SEMI E149 : 2014 | GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT |
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI S7 : 2015 | SAFETY GUIDELINE FOR EVALUATION PERSONNEL AND EVALUATING COMPANY QUALIFICATIONS |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
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