SEMI S23 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMICONDUCTOR MANUFACTURING EQUIPMENT
Superseded date
11-12-2021
Published date
12-01-2013
Defines concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).
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