SEMI T12 : 2010
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS
Published date
12-01-2013
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Lays down concept to trace Jigs and/or Implements used on equipment for processing material and make sure required information, communications and services to realize the concept.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI T12.1 & SEMI T12.2. (02/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI T13.2 : 2004(R2010) | SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING |
| SEMI T15 : 2012 | GENERAL SPECIFICATION OF JIG ID: CONCEPT |
| SEMI T17 :2006(R2018) | SPECIFICATION OF SUBSTRATE TRACEABILITY |
| SEMI T13.1 : 2004(R2010) | SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING |
| SEMI T18 : 2006(R2018) | SPECIFICATION OF PARTS AND COMPONENTS TRACEABILITY |
| SEMI T12.1 : 2004(R2010) | SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS |
| SEMI T12.2 : 2005 | SPECIFICATION FOR XML PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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