SEMI T18 : 2006(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION OF PARTS AND COMPONENTS TRACEABILITY
Available format(s)
Hardcopy
Language(s)
English
Published date
08-11-2018
Gives means to collect and manage data to estimate lifetime or remaining time before such maintenance as calibration, cleaning and replacement more accurately.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2006)
|
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI T12 : 2010 | SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
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