SEMI T4 : 2001(R2013)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS
Published date
12-01-2013
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Ensures dimensional compatibility when mounting pod identification tags and tag identification devices. Also specifies free space at a pod to allow the mounting of a pod identification tag, and free space to allow data transmission.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E47 : 2001(R2006) | SPECIFICATION FOR 150 MM/200 MM POD HANDLES |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E47 : 2001(R2006) | SPECIFICATION FOR 150 MM/200 MM POD HANDLES |
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