SEMI T4 : 2001(R2013)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS
Published date
12-01-2013
Ensures dimensional compatibility when mounting pod identification tags and tag identification devices. Also specifies free space at a pod to allow the mounting of a pod identification tag, and free space to allow data transmission.
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