Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)

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Hardcopy , PDF

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English

Published date

01-08-2015

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Asociación Española de Normalización

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Committee	CTN 209/SC 47
DocumentType	Standard
Pages	15
PublisherName	Asociación Española de Normalización
Status	Current

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UNE-EN 62047-16:2015