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  • SEMI E46 : 2007

    Current The latest, up-to-date edition.

    TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Provides an analytical procedure - Ion Mobility Spectrometry (IMS) - for the determination of organic contamination from minienvironments which has the capability of testing their construction material.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    BS EN ISO 14644-10:2013 Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
    11/30248115 DC : 0 BS EN ISO 14644-8 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION
    UNE-EN ISO 14644-8:2014 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
    DIN EN ISO 14644-8:2013-06 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
    SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
    DIN EN ISO 14644-10:2013-06 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    I.S. EN ISO 14644-8:2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ACC) (ISO 14644-8:2013)
    VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
    01/121101 DC : DRAFT MAR 2001 BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
    BS EN ISO 14644-8:2013 Cleanrooms and associated controlled environments Classification of air cleanliness by chemical concentration (ACC)
    UNI EN ISO 14644-8 : 2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION
    UNI EN ISO 14644-10 : 2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION
    SEMI E108 : 2007 TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY
    EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    EN ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
    UNE-EN ISO 14644-10:2014 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    11/30196563 DC : 0 BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
    PREN ISO 14644-8 : DRAFT 2011 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
    DIN EN ISO 14644-7:2005-01 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004); German version EN ISO 14644-7:2004

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI E108 : 2007 TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY
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