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UNI ISO 14291:2020

Current

Current

The latest, up-to-date edition.

Vacuum gauges -- Definitions and specifications for quadrupole mass spectrometers

Published date

26-11-2020

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This International Standard defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.

Committee
TC 112
DocumentType
Standard
PublisherName
Ente Nazionale Italiano di Unificazione (UNI)
Status
Current

Standards Relationship
ISO 14291:2012 Identical

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