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UNI ISO 14291:2020
Current
Current
The latest, up-to-date edition.
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Vacuum gauges -- Definitions and specifications for quadrupole mass spectrometers
Published date
26-11-2020
This International Standard defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
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