UNI ISO/TS 20175:2020
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Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement
Published date
19-11-2020
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This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z < 300.
| Committee |
CT 36
|
| DocumentType |
Technical Specification
|
| PublisherName |
Ente Nazionale Italiano di Unificazione (UNI)
|
| Status |
Current
|
| Standards | Relationship |
| ISO/TS 20175:2018 | Identical |
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