ASTM F 121 : 1983 : EDT 1
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption (Withdrawn 1989)
English
01-01-2014
01-01-2014
Determines content of interstitial oxygen in single crystal silicon; can be used on crystal with recordable transmission of 10- m infrared radiation. Useful range of oxygen concentration measurable is from 50 ppb atomic (2.5 x 10 atoms/cm ) to maximum amount of interstitial oxygen soluble in silicon.
| DocumentType |
Test Method
|
| Pages |
3
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| Supersedes |
| MIL-STD-989 Base Document:1991 | CERTIFICATION REQUIREMENTS FOR JAN SEMICONDUCTOR DEVICES (NO S/S DOCUMENT) |
| ASTM F 120 : 1988 | Practices for Determination of the Concentration of Impurities in Single Crystal Semiconductor Materials by Infrared Absorption Spectroscopy (Withdrawn 1993) |
| ASTM E 177 : 2014 : REDLINE | Standard Practice for Use of the Terms Precision and Bias in ASTM Test Methods |
| ASTM F 120 : 1988 | Practices for Determination of the Concentration of Impurities in Single Crystal Semiconductor Materials by Infrared Absorption Spectroscopy (Withdrawn 1993) |
| ASTM E 168 : 2016 | Standard Practices for General Techniques of Infrared Quantitative Analysis |
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