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  • ASTM F 121 : 1983 : EDT 1

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption (Withdrawn 1989)

    Available format(s):  Hardcopy, PDF

    Superseded date:  01-01-2014

    Language(s):  English

    Published date:  01-01-2014

    Publisher:  American Society for Testing and Materials

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    Abstract - (Show below) - (Hide below)

    Determines content of interstitial oxygen in single crystal silicon; can be used on crystal with recordable transmission of 10- m infrared radiation. Useful range of oxygen concentration measurable is from 50 ppb atomic (2.5 x 10 atoms/cm ) to maximum amount of interstitial oxygen soluble in silicon.

    General Product Information - (Show below) - (Hide below)

    Document Type Test Method
    Publisher American Society for Testing and Materials
    Status Superseded
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    MIL-STD-989 Base Document:1991 CERTIFICATION REQUIREMENTS FOR JAN SEMICONDUCTOR DEVICES
    ASTM F 120 : 1988 Practices for Determination of the Concentration of Impurities in Single Crystal Semiconductor Materials by Infrared Absorption Spectroscopy (Withdrawn 1993)

    Standards Referencing This Book - (Show below) - (Hide below)

    ASTM E 177 : 2014 : REDLINE Standard Practice for Use of the Terms Precision and Bias in ASTM Test Methods
    ASTM F 120 : 1988 Practices for Determination of the Concentration of Impurities in Single Crystal Semiconductor Materials by Infrared Absorption Spectroscopy (Withdrawn 1993)
    ASTM E 168 : 2016 Standard Practices for General Techniques of Infrared Quantitative Analysis
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