ASTM F 613 : 1993
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001)
Hardcopy , PDF
10-06-2001
English
31-12-2010
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL 10.05 , 2000 For measuring silicon slices and wafers up to 205 mm in diameter and other circular semiconductor materials.
| Committee |
F 01
|
| DocumentType |
Test Method
|
| Pages |
5
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
1.1 This test method covers measurement of the diameter of silicon wafers up to 205 mm in diameter. Other semiconductor materials with a circular shape can also be measured.
1.2 This test method is independent of surface finish and may be performed on edge-contoured specimens.
1.3 This test method is to be carried out at a temperature of 23 + 5°C.
1.4 This test method was developed for use with silicon wafers with standard diameters as given in SEMI Specifications M1, and may be used for wafers of other diameter or materials within the specified limit, provided suitable gage blocks are available and standard flat configurations are used.
1.5 This test method is intended for use as a referee method.
1.6 Roundness is not measured by this method.
1.7 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
1.8 For wafers of diameter 3 in. or smaller, the values stated in inch-pound units are to be regarded as standard; the values stated in acceptable metric units in parentheses are for information only. For wafers of diameter larger than 3 in., the values stated in acceptable metric units are to be regarded as standard whether or not they appear with parentheses; inch-pound units are for information only.
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| ASTM F 522 : 1994 | Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998) |
| ASTM F 43 : 1999 | Standard Test Methods for Resistivity of Semiconductor Materials (Withdrawn 2003) |
| ASTM E 1 : 2014 : REDLINE | Standard Specification for ASTM Liquid-in-Glass Thermometers |
| GGG-G-15 Revision C:1975 | GAGE BLOCKS AND ACCESSORIES (INCH AND METRIC) |
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