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BS EN 62417:2010

Current

Current

The latest, up-to-date edition.

Semiconductor devices. Mobile ion tests for metal-oxide semiconductor field effect transistors (MOSFETs)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

30-06-2010

1 Scope
2 Abbreviations and letter symbols
3 General description
4 Test equipment
5 Test structures
6 Sample size
7 Conditions
8 Procedure
9 Criteria
10 Reporting

Gives a wafer level test procedure to determine the amount of positive mobile charge in oxide layers in metal-oxide semiconductor field effect transistors.

This present standard provides a wafer level test procedure to determine the amount of positive mobile charge in oxide layers in metal-oxide semiconductor field effect transistors. . It is applicable to both active and parasitic field effect transistors. The mobile charge can cause degradation of microelectronic devices, e.g. by shifting the threshold voltage of MOSFETs or by inversion of the base in bipolar transistors.

Committee
EPL/47
DevelopmentNote
Supersedes 07/30163752 DC and 08/30177346 DC. (06/2010)
DocumentType
Standard
Pages
12
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
IEC 62417:2010 Identical
EN 62417 : 2010 Identical

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