BS EN ISO 14644-15:2017

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
6 Representative mode
7 Visual inspection
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
        suitability assessment of one equipment
        (existing installation)
Annex B (informative) - Example calculation for
        suitability assessment of wall material
        (existing cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
        combination of equipment and floor
        material in a cleanroom to be designed
Bibliography

Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.

This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO14644-8).

The following are outside the scope of this document:

• health and safety requirements;

• compatibility with cleaning agents and techniques;

• cleanability;

• biocontamination;

• specific requirements of equipment and materials for processes and products;

• design details of equipment.