Customer Support: +353 (0)1 857 6730

Corporate Website About Us
  • Shopping Cart
    There are no items in your cart
Please enter a keyword to search
Advanced search
Home
CEN
EN ISO 25178-604:2013

EN ISO 25178-604:2013

Current

Current

The latest, up-to-date edition.

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)

Published date

07-08-2013

Publisher

Comite Europeen de Normalisation

Sorry this product is not available in your region.

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
        of a coherence scanning interferometry
        (CSI) microscope
Annex B (informative) - Coherence scanning interferometry
        (CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
        surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Committee
CEN/TC 290
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Current

ISO/TR 14638:1995 Geometrical product specification (GPS) Masterplan
ISO 8015:2011 Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006 Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007 Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
VDI/VDE 2655 Blatt 1.1:2008-03 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
ISO 9334:2007 Optics and photonics Optical transfer function Definitions and mathematical relationships
ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Get in touch with us