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CEN
EN ISO 25178-604:2013

EN ISO 25178-604:2013

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)

Published date

07-08-2013

Publisher

Comite Europeen de Normalisation

Withdrawn date

28-02-2014

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Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
        of a coherence scanning interferometry
        (CSI) microscope
Annex B (informative) - Coherence scanning interferometry
        (CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
        surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Committee
CEN/TC 290
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Withdrawn

ISO/TR 14638:1995 Geometrical product specification (GPS) — Masterplan
ISO 8015:2011 Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006 Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007 Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007 International vocabulary of metrology — Basic and general concepts and associated terms (VIM)
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
VDI/VDE 2655 Blatt 1.1:2008-03 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
ISO 9334:2007 Optics and photonics — Optical transfer function — Definitions and mathematical relationships
ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters

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