I.S. EN 62047-1:2016
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
Hardcopy , PDF
English
01-01-2016
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
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National Foreword
FOREWORD
1 Scope
2 Terms and definitions
Annex A (informative) - Standpoint and criteria in editing
this glossary
Annex B (informative) - Clause cross-references of
IEC 62047-1:2005 and IEC 62047-1:2015
Bibliography
Specifies terms for micro-electromechanical devices including the process of production of such devices.
| DevelopmentNote |
For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
|
| DocumentType |
Standard
|
| Pages |
78
|
| PublisherName |
National Standards Authority of Ireland
|
| Status |
Current
|
| Standards | Relationship |
| NBN EN 62047-1 : 2016 | Identical |
| NF EN 62047-1 : 2016 | Identical |
| SN EN 62047-1:2016 | Identical |
| BS EN 62047-1:2016 | Identical |
| DIN EN 62047-1:2014-05 (Draft) | Identical |
| EN 62047-1:2016 | Identical |
| IEC 60050-815:2015 | International Electrotechnical Vocabulary (IEV) - Part 815: Superconductivity |
| ISO 2041:2009 | Mechanical vibration, shock and condition monitoring Vocabulary |
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
| IEC 60050-521:2002 | International Electrotechnical Vocabulary (IEV) - Part 521: Semiconductor devices and integrated circuits |
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