I.S. EN ISO 14644-10:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)
Hardcopy , PDF
English
01-01-2013
24-06-2022
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Dates of withdrawal of national standards are available from NSAI.
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
surfaces for chemical contamination and
demonstration of compliance
Annex A (informative) - Conversion between different
unit expressions of surface concentration for
chemical substances
Annex B (informative) - Parameters influencing testing
and interpretation of results
Annex C (informative) - Essential considerations for
a good cleanliness assessment
Annex D (informative) - Methods for testing surface
cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
| DocumentType |
Standard
|
| Pages |
43
|
| PublisherName |
National Standards Authority of Ireland
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-10:2013 | Identical |
| ISO 17052:2007 | Rubber, raw — Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography — Thermal desorption (dynamic headspace) method |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments — Part 6: Vocabulary |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 18116:2005 | Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration |
| ISO 10312:1995 | Ambient air — Determination of asbestos fibres — Direct transfer transmission electron microscopy method |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration |
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