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I.S. EN ISO 14644-10:2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)

Available format(s)

Hardcopy , PDF

Superseded date

24-06-2022

Language(s)

English

Published date

01-01-2013

For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.


Dates of withdrawal of national standards are available from NSAI.

€64.00
Excluding VAT

Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
  surfaces for chemical contamination and
  demonstration of compliance
Annex A (informative) - Conversion between different
        unit expressions of surface concentration for
        chemical substances
Annex B (informative) - Parameters influencing testing
        and interpretation of results
Annex C (informative) - Essential considerations for
        a good cleanliness assessment
Annex D (informative) - Methods for testing surface
        cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography

Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).

DocumentType
Standard
Pages
43
PublisherName
National Standards Authority of Ireland
Status
Superseded
SupersededBy

Standards Relationship
EN ISO 14644-10:2013 Identical

ISO 17052:2007 Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 18115-1:2013 Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 18116:2005 Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 10312:1995 Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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