IEC 62047-14:2012
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
English - French
28-02-2012
FOREWORD
1 Scope
2 Normative references
3 Terms, definitions and symbols
4 Testing method
5 Test procedure and analysis
6 Test report
Annex A (informative) - Principles of the forming limit
diagram
Annex B (informative) - Grid marking method
Annex C (informative) - Gripping method
Annex D (informative) - Strain measuring method
IEC 62047-14:2012 describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 μm to 300 μm. The metallic film materials described herein are typically used in electric components, MEMS and micro-devices. When metallic film materials used in MEMS (see 2.1.2 of IEC 62047-1:2005) are fabricated by a forming process such as imprinting, it is necessary to predict the material failure in order to increase the reliability of the components. Through this prediction, the effectiveness of manufacturing MEMS components by a forming process can also be improved, because the period of developing a product can be reduced and manufacturing costs can thus be decreased. This standard presents one of the prediction methods for material failure in imprinting process.
DevelopmentNote |
Stability date: 2018. (09/2017)
|
DocumentType |
Standard
|
Pages |
34
|
PublisherName |
International Electrotechnical Committee
|
Status |
Current
|
Standards | Relationship |
NF EN 62047-14 : 2012 | Identical |
NBN EN 62047-14 : 2012 | Identical |
NEN EN IEC 62047-14 : 2012 | Identical |
PN EN 62047-14 : 2012 | Identical |
UNE-EN 62047-14:2012 | Identical |
BS EN 62047-14:2012 | Identical |
CEI EN 62047-14 : 2013 | Identical |
EN 62047-14:2012 | Identical |
DIN EN 62047-14:2012-10 | Identical |
PNE-FprEN 62047-14 | Identical |
IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.