SEMI 3D3:2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR MULTIWAFER TRANSPORT AND STORAGE CONTAINERS FOR 300 MM, THIN SILICON WAFERS ON TAPE FRAMES
Superseded date
16-11-2023
Superseded by
Published date
28-07-2013
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Gives the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
|
| DocumentType |
Revision
|
| ProductNote |
PRICE HAS BEEN UPDATED
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI G74 : 1999(R2015) | SPECIFICATION FOR TAPE FRAME FOR 300 MM WAFERS |
| SEMI M31 : 2008 | MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS |
| SEMI G87 : 2008(R2015) | SPECIFICATION FOR PLASTIC TAPE FRAME FOR 300 MM WAFER |
| SEMI G94:2013 | SPECIFICATION FOR COIN-STACK TYPE TAPE FRAME SHIPPING CONTAINER FOR 300 MM WAFER |
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