SEMI D11 : 1995(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
Published date
12-01-2013
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Pertains to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI D25 : 2000E(R2006) | SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D16 : 1998 | SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D6 : 2011(R2017) | SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES |
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI E1 : NOV 2010(R2016) | SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D21 : 2006(R2015) | TERMINOLOGY FOR FPD MASK PATTERN ACCURACY |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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