SEMI D11 : 1995(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
Published date
12-01-2013
Pertains to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.
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