SEMI D17 : 2000
Current
The latest, up-to-date edition.
MECHANICAL SPECIFICATION FOR CASSETTES USED TO SHIP FLAT PANEL DISPLAY GLASS SUBSTRATES
12-01-2013
Defines selected requirements of the cassettes used to ship flat panel display value-added substrates from the substrate finisher to the display maker and between process-added users. This standard is aimed at setting levels of definition for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity. It is intended to set an appropriate level of definition that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces with the transportation and automation cassettes' operating mode and substrate accessability with the same robotic elements. This cassette can be used in a "pass through" method.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E44 : 1996 | GUIDE FOR PROCUREMENT AND ACCEPTANCE OF MINIENVIRONMENTS |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.