SEMI E108 : 2007
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY
Published date
12-01-2013
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Describes a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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