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  • SEMI E146 : 2006

    Current The latest, up-to-date edition.

    TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing.

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    Development Note Not available for sale from ILI, customer to contact SEMI. (03/2006)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E19.4 : 2017 SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI M31 : 2008 MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS
    SEMI M50 : 2016 TEST METHOD FOR DETERMINING CAPTURE RATE AND FALSE COUNT RATE FOR SURFACE SCANNING INSPECTION SYSTEMS BY THE OVERLAY METHOD
    SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
    SEMI M52 : 2014 GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS
    SEMI E103 : 2004 MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
    SEMI E108 : 2007 TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY
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