SEMI E118 : NOV 2004E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE
Published date
12-01-2013
Provides a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase interchangeability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.
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