SEMI E118 : NOV 2004E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE
Published date
12-01-2013
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Provides a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase interchangeability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2002) E = Editorially modified to correct errors in Figure R2-1. (03/2006) Includes SEMI E118.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
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| SEMI T7 : 2016 | SPECIFICATION FOR BACK SURFACE MARKING OF DOUBLE-SIDE POLISHED WAFERS WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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