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SEMI E101 : 2004(R2010)

SEMI E101 : 2004(R2010)

Current

Current

The latest, up-to-date edition.

GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Presents a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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