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SEMI E139.3 : 2011

SEMI E139.3 : 2011

Current

Current

The latest, up-to-date edition.

XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies an implementation mapping of the SEMI E139 specification for Recipe and Parameter Management to XML format and the SOAP 1.1 protocol.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2008) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E134 : 2014 SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E128 : 2014 SPECIFICATION FOR XML MESSAGE STRUCTURES
SEMI E138 : 2017 SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI E132 : 2015 SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION

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