SEMI E139.3 : 2011
Current
Current
The latest, up-to-date edition.
XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT
Published date
12-01-2013
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Specifies an implementation mapping of the SEMI E139 specification for Recipe and Parameter Management to XML format and the SOAP 1.1 protocol.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2008) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E132 : 2015 | SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION |
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