SEMI E103 : 2004
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
01-11-2010
12-01-2013
Describes the carrier side of the mechanical interface between load ports (or buffers) with FIMS interfaces on process or metrology equipment and a system that includes a box that holds only one wafer (such as a test wafer) and that fits onto an adapter mechanism called a single-wafer interface (SWIF).
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