SEMI E155 : 2010
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SENSOR ACTUATOR NETWORK FOR MOTIONNET COMMUNICATION
01-11-2010
12-01-2013
Describes a communication specification based on the MOTIONNET protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (04/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E54.1 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E54.18 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE |
| SEMI E54.3 : 1998(R2016) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE |
| SEMI E54.10 : 2000(R2017) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE |
| SEMI E54.11 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES |
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