SEMI E166 : 2014
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 450 MM CLUSTER MODULE INTERFACE: MECHANICAL INTERFACE AND TRANSPORT STANDARD
Published date
08-06-2013
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Specifies the interface plane between modules in a cluster tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E154 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT |
| SEMI E21 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT |
| SEMI E21.1 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: MECHANICAL INTERFACE AND WAFER TRANSPORT |
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