SEMI E19.3 : 2009
Current
Current
The latest, up-to-date edition.
STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT
Published date
12-01-2013
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Describes the port dimensions for 150 mm (6 inch) wafer cassettes. A standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E19 family of standards. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E111 : OCT 2017 | SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE |
| SEMI E117 : 2017 | SPECIFICATION FOR RETICLE LOAD PORT |
| SEMI E47 : 2001(R2006) | SPECIFICATION FOR 150 MM/200 MM POD HANDLES |
| SEMI E112 : OCT 2017 | SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES |
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