SEMI E111 : OCT 2017
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Current
The latest, up-to-date edition.
SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE
Published date
12-01-2013
Defines the 150 mm Reticle SMIF Pod (RSP150) used to transport and store a 6 inch reticle in an integrated circuit (IC) manufacturing facility.
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