SEMI E117 : 2017

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Current The latest, up-to-date edition.

SPECIFICATION FOR RETICLE LOAD PORT

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Published date: 12-01-2013

Publisher: Semiconductor Equipment & Materials Institute

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Specifies dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment.

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Development Note	Not available for sale from ILI, customer to contact SEMI. (12/2002)
Document Type	Standard
ISBN
Pages
Published
Publisher	Semiconductor Equipment & Materials Institute
Status	Current

Standards Referenced By This Book - (Show below) - (Hide below)

SEMI S28 : 2011	SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

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SEMI E19.4 : 2017	SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E19.3 : 2009	STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT
SEMI E72 : 2016	SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT
SEMI E112 : OCT 2017	SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES
SEMI E15-1 : 2005(R2010)	SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E100 : 2004(R2010)	SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
SEMI E15 : 1998E2(R2016)	SPECIFICATION FOR TOOL LOAD PORT
SEMI E111 : OCT 2017	SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE

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