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SEMI E112 : OCT 2017

SEMI E112 : OCT 2017

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the 150 mm Multiple Reticle SMIF Pod (MRSP150) used to transport and store six 6 inch reticles in an integrated circuit (IC) manufacturing facility.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI E30.1 : 2017 SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
SEMI E111 : OCT 2017 SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE

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