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SEMI E19.3 : 2009

SEMI E19.3 : 2009

Current

Current

The latest, up-to-date edition.

STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the port dimensions for 150 mm (6 inch) wafer cassettes. A standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E19 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E111 : OCT 2017 SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE
SEMI E117 : 2017 SPECIFICATION FOR RETICLE LOAD PORT
SEMI E47 : 2001(R2006) SPECIFICATION FOR 150 MM/200 MM POD HANDLES
SEMI E112 : OCT 2017 SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES

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