SEMI E30.5 : 2002(R2017)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM)
19-05-2023
12-01-2013
Gives a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2007) No longer published within the SEMI E30 family of standards. Published and sold separately on its own page. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E141 : 2005 | GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI E37.1 : 2002(R2013) | HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS) |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
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