SEMI E37.1 : 2002(R2013)
Current
Current
The latest, up-to-date edition.
HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS)
Published date
12-01-2013
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Describes a means for independent manufacturers to produce implementations which can be connected without requiring specific knowledge of one another.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E37. (06/2002)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI D27 : 2000 | GUIDE FOR FLAT PANEL DISPLAY EQUIPMENT COMMUNICATION INTERFACES |
| SEMI E123 : 2017 | SPECIFICATION FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) |
| SEMI PV2 : 2009E | GUIDE FOR PV EQUIPMENT COMMUNICATION INTERFACES (PVECI) |
| SEMI E88 : 2007(R2018) | SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM) |
| SEMI HB4 : 2013 | SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI) |
| SEMI E122 : 2017 | SPECIFICATION FOR TESTER EQUIPMENT SPECIFIC EQUIPMENT MODEL (TSEM) |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
| SEMI E30.5 : 2002(R2017) | SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM) |
| SEMI E30.2 : 1998 | HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) |
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