SEMI E42 : 2004
Current
Current
The latest, up-to-date edition.
RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES
Published date
12-01-2013
Describes the concepts required for management of recipes, the operations or behavior provided by the Recipe Management Standard (RMS), and the messages through which services are provided through an interface between the provider and the user of these services.
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