SEMI E47 : 2001(R2006)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 150 MM/200 MM POD HANDLES
Published date
12-01-2013
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Provides a unified form and location for pod handles to enable automatic pod handling. Defines the dimensions and location of handles on 150 mm/200 mm pod.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI M49 : 2016 | GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS |
| SEMI M52 : 2014 | GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI T4 : 2001(R2013) | SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS |
| SEMI E19.4 : 2017 | SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E19.3 : 2009 | STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT |
| SEMI T4 : 2001(R2013) | SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
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