SEMI E83 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE
Published date
12-01-2013
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Pertains to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E162 : 2012 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT |
| SEMI G82 : 2015 | SPECIFICATION FOR 300 MM LOAD PORT FOR FRAME CASSETTES IN BACKEND PROCESS |
| SEMI E64 : 2005(R2012) | SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT |
| SEMI E154 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI G95 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT FOR TAPE FRAME CASSETTES IN THE BACKEND PROCESS |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
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