SEMI E94 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR CONTROL JOB MANAGEMENTT
Superseded date
05-04-2024
Superseded by
Published date
12-01-2013
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Specifies equipment provided services to the factory that supports a high level of factory automation.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E94.1. (07/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E94.1 : 2007 | SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM) |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E126 : 2008(R2018) | SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP) |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E170 : DEC 2017 | SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI HB4 : 2013 | SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI) |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI G66:1996(R2023) | Test Method for the Measurement of Water Absorption Characteristics for Semiconductor Plastic Molding Compounds |
| SEMI E126:2008(R2023) | Specification for Equipment Quality Information Parameters (EQIP) |
| SEMI E87:2023 | Specification for Carrier Management (CMS) |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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