SEMI E98 : 2009
Current
Current
The latest, up-to-date edition.
PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
Published date
12-01-2013
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Provides definitions, services, and behavior, as seen through communications with the factory, for the common types of physical and logical objects of which equipment is typically composed, including the equipment itself.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E98.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E98.1 : NOV 2002(R2009) | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL |
| SEMI E126 : 2008(R2018) | SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP) |
| SEMI T17 :2006(R2018) | SPECIFICATION OF SUBSTRATE TRACEABILITY |
| SEMI T18 : 2006(R2018) | SPECIFICATION OF PARTS AND COMPONENTS TRACEABILITY |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E42 : 2004 | RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES |
| SEMI E41 : 1995 | EXCEPTION MANAGEMENT (EM) STANDARD |
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E53 : 2004 | EVENT REPORTING |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
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